Thanks Neil
I am not trying to write a PhD thesis here, but the article did contain the "well-known Rayleigh-Plesset" equation for bubble dynamics in an acoustic field, with references. The article is probably not peer reviewed and it covers ultrasonic and "megasonic" cleaning of both metallic and non-metallic surfaces. So general background stuff in this context.
Your comments on significant particles sizes are very useful and a little smaller than I expected. But the average groove depth is reported as about 28 microns so it makes sense.
Occasionally I accidentally touch the surface of my tank when it is working and am amazed at the tiny cloud of stuff coming from my fingertips.
There are very few clean rooms in Canberra - one is used to diagnose issues with diesel injectors and pumps. It is a centre of excellence for Toyota Australia and often hosts delegations from Japan.

